• Negative-acting resists designed to produce coating thicknesses that
range from 20,000A to 60,000A.
• High quality images with excellent edge acuity are produced that are
resistant to a variety of etchants including those commonly employed to
etch silicon.
• SC Resists virtually eliminate post-development scumming that is
related to ambient conditions.
• Process latitude is improved and productivity Increased by minimizing
poor development effects caused by process delays.
• SC Resist images have good adhesion to a variety of substrates and
are resistant to nitric/hydrofluoric/ acetic acid solutions, buffered
hydrofluoric acid etchants, and solutions employed to etch metal layers.
• SC Resists are compatible with In-line and convection bake ovens and
can be developed with spray or immersion processes.
• SC Resists exhibit post sensitivity in the Near UV portion of the
spectrum.
• They can be employed in alignment systems that contain exposure
sources, such as mercury lamps, whose intensity is sufficient to produce
cross linking.
• It is recommended that coated, unexposed substrates, and unopened
bottles of resist be handled under gold fluorescent lamps or other light
sources with suitable ultraviolet filters.
Category: Brands / FUJIFILM Electronic Materials / Photoresists
|
|
|||||||||||||
|
|||||||||||||